基于气动高速开关阀的容腔压力精确控制

基于气动高速开关阀的容腔压力精确控制

孙志涵, 王涛, 王波

Accurate Pressure Control of Chamber Using Pneumatic High-speed On/Off Valve

SUN Zhi-han, WANG Tao, WANG Bo

液压与气动 . 2023, (1): 146 -150 . DOI: 10.11832/j.issn.1000-4858.2023.01.017