Research on High-Efficiency Rare Earth Polishing Slurry for CMP of Optical Glass

doi:10.3969/j.issn.0254-0150.2023.05.012

WANG Ye, ZHANG Baoguo, WU Pengfei, XIE Mengchen, LI Ye, LI Haoran

Lubrication Engineering ›› 2023, Vol. 48 ›› Issue (5) : 79-84.

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Lubrication Engineering ›› 2023, Vol. 48 ›› Issue (5) : 79-84. DOI: 10.3969/j.issn.0254-0150.2023.05.012

Research on High-Efficiency Rare Earth Polishing Slurry for CMP of Optical Glass

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 48(5): 79-84 https://doi.org/10.3969/j.issn.0254-0150.2023.05.012

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Received	Revised	Published
2022-01-17	2022-03-25	2023-05-15
Issue Date
2023-12-21

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