Development of Polishing Slurry for Fine Ultrasonic Atomization Polishing of Quartz Glass

doi:10.3969/j.issn.0254-0150.2021.11.016

YUAN Xiaoce, LI Qingzhong, YANG Siyuan

Lubrication Engineering ›› 2021, Vol. 46 ›› Issue (11) : 103-108.

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Lubrication Engineering ›› 2021, Vol. 46 ›› Issue (11) : 103-108. DOI: 10.3969/j.issn.0254-0150.2021.11.016

Development of Polishing Slurry for Fine Ultrasonic Atomization Polishing of Quartz Glass

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 46(11): 103-108 https://doi.org/10.3969/j.issn.0254-0150.2021.11.016

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Received	Revised
2020-10-25	2020-12-28
Issue Date
2022-07-06

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