Technological Experiment of Cluster Magnetorheological Finishing of InP Wafer with Dynamic Magnetic Fields

doi:10.3969/j.issn.0254-0150.2021.11.007

SUN Shikong, LU Jiabin, YAN Qiusheng

Lubrication Engineering ›› 2021, Vol. 46 ›› Issue (11) : 40-45.

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Lubrication Engineering ›› 2021, Vol. 46 ›› Issue (11) : 40-45. DOI: 10.3969/j.issn.0254-0150.2021.11.007

Technological Experiment of Cluster Magnetorheological Finishing of InP Wafer with Dynamic Magnetic Fields

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 46(11): 40-45 https://doi.org/10.3969/j.issn.0254-0150.2021.11.007

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Received	Revised
2020-10-18	2021-01-06
Issue Date
2022-07-06

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