This paper proposes a new method for measurement of the roll error motion of a slide table in a precision linear slide. The proposed method utilizes a pair of clinometers in the production process of a precision linear slide, where the roll error motion measurement will be carried out repeatedly to confrm whether the surface form errors of slide guideways in the linear slide are sufciently corrected by hand scraping process. In the proposed method, one of the clinometers is mounted on the slide table, while the other is placed on a vibration isolation table, on which the precision linear slide is mounted, so that infuences of external disturbances can be cancelled. An experimental setup is built on a vibration isolation table, and some experiments are carried out to verify the feasibility of the proposed method.
Yuki Shimizu
,
Satoshi Kataoka
,
Wei Gao
. High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide[J]. Chinese Journal of Mechanical Engineering, 2018
, 31(5)
: 92
-92
.
DOI: 10.1186/s10033-018-0294-6
This paper proposes a new method for measurement of the roll error motion of a slide table in a precision linear slide. The proposed method utilizes a pair of clinometers in the production process of a precision linear slide, where the roll error motion measurement will be carried out repeatedly to confrm whether the surface form errors of slide guideways in the linear slide are sufciently corrected by hand scraping process. In the proposed method, one of the clinometers is mounted on the slide table, while the other is placed on a vibration isolation table, on which the precision linear slide is mounted, so that infuences of external disturbances can be cancelled. An experimental setup is built on a vibration isolation table, and some experiments are carried out to verify the feasibility of the proposed method.
[1] K Sato. High-precision and high-speed positioning of 100G linear synchronous motor. Precision Engineering, 2015, 39: 31-37.
[2] M Week. Linear magnetic bearing and levitation system for machine tools, CIRP Annals-Manufacturing Technology, 1998, 47(1): 311-314.
[3] K Erkorkmaz, M Gorniak. Precision machine tool X-Y stage utilizing a planar air bearing arrangement. CIRP Annals-Manufacturing Technology, 2010, 59(1): 425-428.
[4] H Kunzmann, T Pfeifer, J Flügge. Scales vs. laser interferometers performance and comparison of two measuring systems. CIRP Annals-Manufacturing Technology, 1993, 42(2): 753-767.
[5] W Gao, S W Kim, H Bosse, et al. Measurement technologies for precision positioning. CIRP Annals-Manufacturing Technology, 2015, 64(2): 773-796.
[6] J B Bryan. The Abbe principle revisited - an updated interpretation. Precision Engineering, 1979, 1(3): 129-132.
[7] W Knapp. Measurement uncertainty and machine tool testing. CIRP Annals-Manufacturing Technology, 2002, 51(1): 459-462.
[8] H Schwenke, W Knapp, H Haitjema, et al. Geometric error measurement and compensation of machines - an update. CIRP Annals-Manufacturing Technology, 2008, 57(2): 660-675.
[9] Y Shimizu, S Goto, S Ito, et al. Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite. Precision Engineering, 2013, 37: 640-649.
[10] W Gao, Y Arai, A Shibuya, et al. Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage. Precision Engineering, 2006, 30(1): 96-103.
[11] W Gao. Precision nanometrology. Springer, London, 2010.
[12] X Li, W Gao, H Muto, et al. A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage. Precision Engineering, 2013, 37: 771-781.
[13] K C Fan, M J Chen. A 6-degree-of-freedom measurement system for the accuracy of X-Y stages. Precision Engineering, 2000, 24(1): 15-23.
[14] S L Tan, Y Shimizu, T Meguro, et al. Design of a laser autocollimator-based optical sensor with a rangefinder for error correction of precision slide guideways. International Journal of Precision Engineering and Manufacturing, 2015, 16(3): 423-431.
[15] Heidenhain. Exposed linear encoders. Heidenhain, 2016.
[16] W R Moore. Foundations of mechanical accuracy. The Moore Special Tool Co., MIT Press, 1970.
[17] W Gao, Y Saito, H Muto, et al. A three-axis autocollimator for detection of angular error motions of a precision stage. CIRP Annals-Manufacturing Technology, 2011, 60(1): 515-518.
[18] Y Shimizu, S L Tan, D Murata, et al. Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions. Optics Express, 2016, 24(3): 2788-2805.
[19] Y L Chen, Y Shimizu, Y Kudo, et al. Mode-locked laser autocollimator with an expanded measurement range. Optics Express, 2016, 24(14): 15554-15569.
[20] Y L Chen, Y Shimizu, J Tamada, et al. Optical frequency domain angle measurement in a femtosecond laser autocollimator. Optics Express, 2017, 25(14): 16725-16738.
[21] J Tamada, Y Kudo, Y L Chen, et al, Determination of the zero-position for an optical angle sensor. Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2016, 10(5): 00072.
[22] K C Fan, T H Wang, S Y Lin, et al. Design of a dual-axis optoelectronic level for precision angle measurements. Measurement Science and Technology, 2011, 22(5): 055302.
[23] K Venkateswara, C A Hagedorn, M D Turner, et al. A high-precision mechanical absolute-rotation sensor. Review of Scientific Instruments, 2014, 85(1): 015005.
[24] F S Alves, R A Dias, J M Cabral, et al. High-resolution MEMS inclinometer based on pull-in voltage. Journal of Microelectromechanical Systems, 2015, 24(4): 931-939.
[25] H Ueda, H Ueno, K Itoigawa, et al. Development of micro capacitive inclination sensor. IEEJ Transactions on Sensors and Micromachines, 2006, 126(12): 637-642.
[26] Y Shimizu, S Kataoka, T Ishikawa, et al. A liquid-surface-based three-axis inclination sensor for measurement of stage tilt motions. Sensors, 2018, 18: 398.
[27] Sherbome Sensor, LSOP-LSOC-2013 Iss1. Sherborne Sensors, 2013.
[28] S L Tan, S Kataoka, T Ishikawa, et al. An ultra-precision electronic clinometer for measurement of small inclination angles. Journal of the Korean Society of Manufacturing Technology Engineers, 2014, 23(6): 539-546.
[29] S Kataoka, T Ishikawa, Y Shimizu, et al. Measurement of angular error motions of a precision linear stage by using a high resolution clinometer. Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, 2015: https://doi.org/10.1299/jsmelem.2015.8._1505-1_.