Software development of measuring and controlling system for the rotation error of nano aerostatic bearing

QIAN Linhong, FENG Yanbing, ZHANG Xinjiang, LEI Dajiang, LAN He, CUI Hailong, ZHENG Yueqing

Manufacturing Technology & Machine Tool ›› 2022, Vol. 0 ›› Issue (6) : 176-180.

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Manufacturing Technology & Machine Tool ›› 2022, Vol. 0 ›› Issue (6) : 176-180. DOI: 10.19287/j.mtmt.1005-2402.2022.06.028
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Software development of measuring and controlling system for the rotation error of nano aerostatic bearing

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 0(6): 176-180 https://doi.org/10.19287/j.mtmt.1005-2402.2022.06.028

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