单晶硅纳米磨削亚表面损伤形成机制及其抑制研究
田海兰, 韩涛, 闫少华, 易红星, 闫海鹏
Study on formation mechanism and suppression of subsurface damage during nano-grinding of monocrystalline silicon
TIAN Hailan, HAN Tao, YAN Shaohua, YI Hongxing, YAN Haipeng
制造技术与机床
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2023, (3): 24
-30
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DOI: 10.19287/j.mtmt.1005-2402.2023.03.003
