光学元件超光滑表面的流体动压抛光特性研究
付振峰, 王振忠, 王彪, 申冰怡, 黄雪鹏
Hydrodynamic effect polishing characteristics of ultra-smooth surfaces of optical components
FU Zhenfeng, WANG Zhenzhong, WANG Biao, SHEN Bingyi, HUANG Xuepeng
制造技术与机床
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2022, (6): 11
-17
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DOI: 10.19287/j.mtmt.1005-2402.2022.06.002