Wafer Yield Prediction Method Based on CNN-LSTM

doi:10.13462/j.cnki.mmtamt.2023.07.032

WU Lihui, ZHOU Xiu, ZHANG Zhongwei

Modular Machine Tool & Automatic Manufacturing Technique ›› 2023, Vol. 0 ›› Issue (7) : 142-146,151.

PDF(1526 KB)

Modular Machine Tool & Automatic Manufacturing Technique ›› 2023, Vol. 0 ›› Issue (7) : 142-146,151. DOI: 10.13462/j.cnki.mmtamt.2023.07.032

Wafer Yield Prediction Method Based on CNN-LSTM

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 0(7): 142-146,151 https://doi.org/10.13462/j.cnki.mmtamt.2023.07.032

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(1526 KB)

Accesses

Citation

Detail

Sections

Recommended

Received	Revised	Published
2022-09-30	2022-11-06	2023-07-20
Issue Date
2023-12-21

Please choose a citation manager

Content to export