<div>半导体制造中涂胶工艺的研究进展</div>

半导体制造中涂胶工艺的研究进展

向东1, 何磊明1, 瞿德刚1, 2, 牟鹏1, 段广洪1

Development of Coating of Photoresist in Semiconductor Manufacturing

XIANG Dong-1, HE Lei-Meng-1, JI De-Gang-1, 2, MAO Feng-1, DUAN An-Hong-1

中国机械工程 . 2012, (3): 354 -361 .