高功率脉冲磁控溅射仿真技术研究进展∗

崔岁寒，郭宇翔，陈秋皓，吴忠振

Research Progress of Simulation Technique on High Power Impulse Magnetron Sputtering

CUI Suihan, GUO Yuxiang, CHEN Qiuhao, WU Zhongzhen

中国表面工程 . 2022, (5): 23 -41 . DOI: 10.11933/j.issn.1007-9289.20211226003