TFT-LCD玻璃基板精细雾化抛光的工艺参数优化

莫益栋，李庆忠

Optimizing Process Parameters of Ultrasound Fine Atomization CMP on TFT-LCD Glass Substrate

MO Yidong, LI Qingzhong

中国表面工程 . 2015, (2): 121 -125 . DOI: 10.11933/j.issn.1007-9289.2015.02.014