磁控溅射沉积Al/AlN纳米多层膜的摩擦学性能

王云锋，张广安，吴志国

Tribological Properties of Al/AlN Multilayers Prepared by Magnetron Sputtering Technique

WANG Yunfeng, ZHANG Guangan, WU Zhiguo

中国表面工程 . 2016, (1): 58 -63 . DOI: 10.11933/j.issn.1007-9289.2016.01.009