退火处理对WC-DLC薄膜结构及性能的影响

退火处理对WC-DLC薄膜结构及性能的影响

刘正兵,周升国,吴杨敏,王顺才

Effects of Annealed Treatment on Structure and Performance of WC-DLC Films

LIU Zheng-bing, ZHOU Sheng-guo, WU Yang-min and WANG Shun-cai

中国表面工程 . 2017, (3): 16 -24 . DOI: 10.11933/j.issn.1007-9289.20161117005