Fluid Characteristics of Pneumatic Diaphragm Valves for Integrated Circuits

doi:10.11832/j.issn.1000-4858.2023.05.018

TANG Jin-xin, LI Pei-yuan, CHEN Bo, ZHOU Lin-zhen

Chinese Hydraulics & Pneumatics ›› 2023, Vol. 47 ›› Issue (5) : 135-142.

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Chinese Hydraulics & Pneumatics ›› 2023, Vol. 47 ›› Issue (5) : 135-142. DOI: 10.11832/j.issn.1000-4858.2023.05.018

Fluid Characteristics of Pneumatic Diaphragm Valves for Integrated Circuits

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 47(5): 135-142 https://doi.org/10.11832/j.issn.1000-4858.2023.05.018

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Received	Revised	Published
2022-11-07	2023-01-16	2023-05-15
Issue Date
2023-05-22

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