Flow Characteristics of Ultrapure Water Diaphragm Valve under Different Driving Modes

doi:10.11832/j.issn.1000-4858.2022.05.002

MIN Wei, MI Zhi-qiang, LI Cheng, WANG Zhuo-feng, XU Min

Chinese Hydraulics & Pneumatics ›› 2022, Vol. 46 ›› Issue (5) : 18-25.

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Chinese Hydraulics & Pneumatics ›› 2022, Vol. 46 ›› Issue (5) : 18-25. DOI: 10.11832/j.issn.1000-4858.2022.05.002

Flow Characteristics of Ultrapure Water Diaphragm Valve under Different Driving Modes

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 46(5): 18-25 https://doi.org/10.11832/j.issn.1000-4858.2022.05.002

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Received	Revised	Published
2021-11-10	2021-12-18	2022-05-15
Issue Date
2022-05-26

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