PDF(793 KB)
GMM Thin Films Micropump Based on the Double Plane Coil Driving
KOU Qi-qi, ZHANG Hui, XU Ya-feng, MA Si-yu, WANG Chuan-li
Chinese Hydraulics & Pneumatics ›› 2014, Vol. 0 ›› Issue (11) : 15-18.
PDF(793 KB)
PDF(793 KB)
GMM Thin Films Micropump Based on the Double Plane Coil Driving
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