Simulation Analysis and Process Design of Membrane in Thermally Actuated Micro-valve

CAO Jian, TANG Jian-zhong, ZHU Xiao-cong

Chinese Hydraulics & Pneumatics ›› 2014, Vol. 0 ›› Issue (1) : 13-17.

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Chinese Hydraulics & Pneumatics ›› 2014, Vol. 0 ›› Issue (1) : 13-17. DOI: 10.11832/j.issn.1000-4858.2014.01.004

Simulation Analysis and Process Design of Membrane in Thermally Actuated Micro-valve

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 0(1): 13-17 https://doi.org/10.11832/j.issn.1000-4858.2014.01.004

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