Determination of 14 Metal Impurities in N-Methylpyrrolidone for Integrated Circuits by Triple Quadrupole Inductively Coupled Plasma Mass Spectrometry

LI Chunhua, GAO Yiming, HAO Ping, TIAN Yuping, CAO Jianxiong, LI Jie

Physical Testing and Chemical Analysis Part B:Chemical Analgsis ›› 2023, Vol. 59 ›› Issue (9) : 1073-1076.

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Physical Testing and Chemical Analysis Part B:Chemical Analgsis ›› 2023, Vol. 59 ›› Issue (9) : 1073-1076. DOI: 10.11973/lhjy-hx202309015
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Determination of 14 Metal Impurities in N-Methylpyrrolidone for Integrated Circuits by Triple Quadrupole Inductively Coupled Plasma Mass Spectrometry

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(9): 1073-1076 https://doi.org/10.11973/lhjy-hx202309015

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