THE OPTIMIZATION OF OVAL VARIABLE CROSS-SECTION BEAM IN MEMS

doi:10.16579/j.issn.1001.9669.2019.04.017

SUN JiangHong, LU KunLei, YI YuanLin, HAN JianNan

Journal of Mechanical Strength ›› 2019, Vol. 41 ›› Issue (4) : 871-875.

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Journal of Mechanical Strength ›› 2019, Vol. 41 ›› Issue (4) : 871-875. DOI: 10.16579/j.issn.1001.9669.2019.04.017

THE OPTIMIZATION OF OVAL VARIABLE CROSS-SECTION BEAM IN MEMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 41(4): 871-875 https://doi.org/10.16579/j.issn.1001.9669.2019.04.017

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Received	Revised	Published
2017-09-30	2017-11-24	2019-08-20
Issue Date
2019-11-02

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