Method for Structural Optimization Design of Wafer Handling Robot Arms

LIU Yanjie,WU Mingyue,WANG Gang,CAI Hegao

Journal of Mechanical Engineering ›› 2015, Vol. 51 ›› Issue (1) : 1-9.

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Journal of Mechanical Engineering ›› 2015, Vol. 51 ›› Issue (1) : 1-9. DOI: 10.3901/JME.2015.01.001

Method for Structural Optimization Design of Wafer Handling Robot Arms

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 51(1): 1-9 https://doi.org/10.3901/JME.2015.01.001

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