REN Xin, ZHAO Rui-shan, HUANG Mei-dong, ZHANG Chong-yi, WANG Qian-bao
TiCN film was prepared on 304 stainless steel at different pulse negative bias amplitudes by the compound ion plating technology. The effects of pulse negative bias amplitude on composition, structure, surface roughnesss, microhardness and friction and wear properties of the film were studied. The results show that, with the increase of negative bias amplitude, the atom ratio of Ti and C to N first increased and then decreased, as well as the ratio of C to Ti. The size of particles, pinholes and pits on the film surface decreased, and their quantity also reduced with the increase of negative bias amplitude, these improve the surface morphology of the film. The film was mainly composed of TiCN phase, presenting the (111) preferred orientation with the increase of negative bias amplitude. In addition, microhardness of the film first increased then decreased with the increase of negative bias amplitude, reaching a maximum of 2 690 HV at 300 V. Friction and wear properties of the film are always better than that of the substrate, and the friction coefficient of TiCN film decreased with the increase of negative bias amplitude; when the negative bias amplitude was 300 V, the friction coefficient was up to 0.355, indicating that the optimal friction and wear properties was achieved.