Research Progress on Precious Metal Sputtering Target

XU Yanting, GUO Junmei, WANG Chuanjun, SHEN Yue, GUAN Weiming, WEN Ming

Materials For Mechanical Engineering ›› 2021, Vol. 45 ›› Issue (8) : 8-14,102.

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Materials For Mechanical Engineering ›› 2021, Vol. 45 ›› Issue (8) : 8-14,102. DOI: 10.11973/jxgccl202108002

Research Progress on Precious Metal Sputtering Target

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 45(8): 8-14,102 https://doi.org/10.11973/jxgccl202108002

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