Effects of Pulsed Negative Bias Amplitudes on Structure and Properties of TiCN Film Prepared by Compound Ion Plating Technology

REN Xin, ZHAO Rui-shan, HUANG Mei-dong, ZHANG Chong-yi, WANG Qian-bao

Materials For Mechanical Engineering ›› 2017, Vol. 41 ›› Issue (1) : 56-60,64.

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Materials For Mechanical Engineering ›› 2017, Vol. 41 ›› Issue (1) : 56-60,64. DOI: 10.11973/jxgccl201701012
Testing & Research

Effects of Pulsed Negative Bias Amplitudes on Structure and Properties of TiCN Film Prepared by Compound Ion Plating Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 41(1): 56-60,64 https://doi.org/10.11973/jxgccl201701012

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