Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)

Francesc Caballero-Lucas, Kotaro Obata, Koji Sugioka

International Journal of Extreme Manufacturing ›› 2022, Vol. 4 ›› Issue (1) : 15103-015103.

PDF(1242 KB)
PDF(1242 KB)
International Journal of Extreme Manufacturing ›› 2022, Vol. 4 ›› Issue (1) : 15103-015103. DOI: 10.1088/2631-7990/ac466e

Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 4(1): 15103-015103 https://doi.org/10.1088/2631-7990/ac466e

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(1242 KB)

Accesses

Citation

Detail
Sections
Recommended
　 Copyright © International Journal of Extreme Manufacturing, All Rights Reserved.
Powered by Beijing Magtech Co. Ltd,.

/

〈 〉