PDF(1304 KB)
Application of selective anodic bonding technology in grating gyroscope
HAO Feifan, LI Mengwei, WANG Junqiang, JIN Li, GENG Hao
Transactions of The China Welding Institution ›› 2020, Vol. 41 ›› Issue (12) : 61-66.
PDF(1304 KB)
PDF(1304 KB)
Application of selective anodic bonding technology in grating gyroscope
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