Application of selective anodic bonding technology in grating gyroscope

HAO Feifan, LI Mengwei, WANG Junqiang, JIN Li, GENG Hao

Transactions of The China Welding Institution ›› 2020, Vol. 41 ›› Issue (12) : 61-66.

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Transactions of The China Welding Institution ›› 2020, Vol. 41 ›› Issue (12) : 61-66. DOI: 10.12073/j.hjxb.20200419001

Application of selective anodic bonding technology in grating gyroscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 41(12): 61-66 https://doi.org/10.12073/j.hjxb.20200419001

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