Effect of Carbon Content on Thermal Stability of BCN Thin Film Prepared by Arc Enhanced Reactive Magnetron Sputtering Method

CHEN Xiangyang, ZHANG Jin, HUANG Run, MA Shengli

Special Casting & Nonferrous Alloys ›› 2017, Vol. 41 ›› Issue (10) : 44-47.

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Special Casting & Nonferrous Alloys ›› 2017, Vol. 41 ›› Issue (10) : 44-47. DOI: 10.11973/jxgccl201710010

Effect of Carbon Content on Thermal Stability of BCN Thin Film Prepared by Arc Enhanced Reactive Magnetron Sputtering Method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 41(10): 44-47 https://doi.org/10.11973/jxgccl201710010

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