用于光学玻璃CMP的高效稀土抛光液研究
王也, 张保国, 吴鹏飞, 谢孟晨, 李烨, 李浩然
Research on High-Efficiency Rare Earth Polishing Slurry for CMP of Optical Glass
WANG Ye, ZHANG Baoguo, WU Pengfei, XIE Mengchen, LI Ye, LI Haoran
润滑与密封
.
2023, (5): 79
-84
.
DOI: 10.3969/j.issn.0254-0150.2023.05.012
