集成电路钴化学机械抛光缺陷控制的研究进展
纪金伯, 张男男, 檀柏梅, 张师浩, 闫妹, 李伟
Research Progress of Cobalt CMP Defect Control in Integrated Circuits
JI Jinbo, ZHANG Nannan, TAN Baimei, ZHANG Shihao, YAN Mei, LI Wei
润滑与密封
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2023, (7): 190
-197
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DOI: 10.3969/j.issn.0254-0150.2023.07.028
