Abstract：In order to enrich the detection content of the solenoid sensor for hydraulic oil contaminants, a multi-function detection sensor based on microfluidic chip is proposed and fabricated. The inductance detection model of metal particles and capacitance detection model of non-metal particles are constructed theoretically for the opposed solenoid coil. In order to further improve the detection sensitivity, the effect of silicon steel sheet on the sensitivity of inductance detection and capacitance detection is tested. The experimental results show that the silicon steel sheet can significantly improve the detection sensitivity of the metal particles of the opposing solenoid coil. The SNR of detecting 60-70 μm iron particles and 160-170 μm copper particles is increased by 127.44% and 222.07%, respectively. The detection sensitivity of the non-metallic particles of opposite solenoid coil is not significant, and the SNR of detecting the 140-150 μm water droplet and the 240-250 μm bubble is increased by 21.92% and 7.95%, respectively. This research is expected to provide support for improving the detection capability of the hydraulic oil contaminant of the solenoid sensor, which is of great significance for the monitoring of the health status of the hydraulic system and fault diagnosis.
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