Materials For Mechanical Engineering  2021, Vol. 45 Issue (8): 8-14,102    DOI: 10.11973/jxgccl202108002
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Research Progress on Precious Metal Sputtering Target
XU Yanting1,2, GUO Junmei1,2, WANG Chuanjun1,2, SHEN Yue1,2, GUAN Weiming1,2, WEN Ming1,2
1. State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino Platinum Metals Co., Ltd., Kunming 650106, China;
2. Kunming Institute of Precious Metals, Kunming 650106, China
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