雾化辅助CVD腔体的优化设计与实现
樊俊良, 肖黎, 罗月婷, 陈刚, 瞿小林, 唐毅, 龚恒翔
Optimization design and implementation of atomization assisted CVD cavity
FAN Junliang, XIAO Li, LUO Yueting, CHEN Gang, JU Xiaolin, TANG Yi, GONG Hengxiang
工程设计学报
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2023, (2): 182
-188
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DOI: 10.3785/j.issn.1006-754X.2023.00.018
